Publication:
Integration aspects of stacked SBT FeCAPs for embedded FeRAM
Date
| dc.contributor.author | Wouters, Dirk | |
| dc.date.accessioned | 2021-10-15T00:03:11Z | |
| dc.date.available | 2021-10-15T00:03:11Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7060 | |
| dc.source.conference | MRS Fall Meeting Symposium U: Ferroelectric Thin Films XI | |
| dc.source.conferencedate | 1/12/2002 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Integration aspects of stacked SBT FeCAPs for embedded FeRAM | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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