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Characterization of ultra thin layers by Rutherford backscattering spectrometry
Publication:
Characterization of ultra thin layers by Rutherford backscattering spectrometry
Date
1999
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Deleu, Jeroen
;
Conard, Thierry
;
Li, H.
;
Loo, Roger
;
Caymax, Matty
;
Nakajima, K.
;
Kimura, K.
;
Vandervorst, Wilfried
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1912
since deposited on 2021-10-06
Acq. date: 2025-10-24
Citations
Metrics
Views
1912
since deposited on 2021-10-06
Acq. date: 2025-10-24
Citations