Publication:
Dual beam FIB/SEM cross-section imaging of nano-structures
Date
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Drijbooms, Chris | |
| dc.contributor.author | Van Marcke, Patricia | |
| dc.contributor.author | Geypen, Jef | |
| dc.contributor.author | Marrant, Koen | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Drijbooms, Chris | |
| dc.contributor.imecauthor | Van Marcke, Patricia | |
| dc.contributor.imecauthor | Geypen, Jef | |
| dc.date.accessioned | 2021-10-16T15:03:42Z | |
| dc.date.available | 2021-10-16T15:03:42Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11714 | |
| dc.source.conference | FIBforAll | |
| dc.source.conferencedate | 12/10/2007 | |
| dc.source.conferencelocation | Antwerpen Belgium | |
| dc.title | Dual beam FIB/SEM cross-section imaging of nano-structures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |