Publication:

Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

Date

2009

Proceedings Paper

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Files

19246.pdf 1.08 MB

Author(s)

Veloso, Anabela

;

;

Collaert, Nadine

;

De Keersgieter, An

;

Witters, Liesbeth

;

Rooyackers, Rita

;

Redolfi, Augusto

;

;

;

;

Vellianitis, Georgios

;

Duriez, Blandine

;

Merelle, Thomas

;

Absil, Philippe

;

Biesemans, Serge

;

;

Hoffmann, Thomas Y.

;

Statistics

1972 since deposited on 2021-10-18

Acq. date: 2026-07-17