Publication:
Low dielectric constant materials for nanoelectronics
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Wu, Chen | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-23T10:05:23Z | |
| dc.date.available | 2021-10-23T10:05:23Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26308 | |
| dc.source.beginpage | 163 | |
| dc.source.book | Thin Films on Silicon: Electronic and Photonic Applications | |
| dc.source.endpage | 271 | |
| dc.title | Low dielectric constant materials for nanoelectronics | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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