Publication:
The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Geenen, Luc | |
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-16T06:35:11Z | |
| dc.date.available | 2021-10-16T06:35:11Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11468 | |
| dc.source.conference | Abstracts Book 15th International Conference on Secondary Ion Mass Spectrometry - SIMS XV | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Manchester UK | |
| dc.title | The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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