Publication:
Probing nitride thin films in 3-dimensions using a variable energy electron beam
Date
| dc.contributor.author | Trager-Cowan, C. | |
| dc.contributor.author | Middleton, P. G. | |
| dc.contributor.author | Mohammed, A. | |
| dc.contributor.author | Manson-Smith, S. K. | |
| dc.contributor.author | Osborne, I. | |
| dc.contributor.author | Barisonzi, M. | |
| dc.contributor.author | O'Donnell, K. P. | |
| dc.contributor.author | Van der Stricht, Wim | |
| dc.contributor.author | Jacobs, Koen | |
| dc.contributor.author | Moerman, Ingrid | |
| dc.contributor.author | Demeester, Piet | |
| dc.contributor.imecauthor | Moerman, Ingrid | |
| dc.contributor.imecauthor | Demeester, Piet | |
| dc.contributor.orcidimec | Moerman, Ingrid::0000-0003-2377-3674 | |
| dc.contributor.orcidimec | Demeester, Piet::0000-0003-2810-3899 | |
| dc.date.accessioned | 2021-10-14T11:43:21Z | |
| dc.date.available | 2021-10-14T11:43:21Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3882 | |
| dc.source.conference | MRS Fall Meeting; November 1999; Boston, USA. | |
| dc.source.conferencelocation | ||
| dc.title | Probing nitride thin films in 3-dimensions using a variable energy electron beam | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |