Publication:
Selective etches for gate-all-around (GAA) device integration: opportunities and challenges
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Acq. date: 2026-05-17
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1 since deposited on 2021-10-27
Acq. date: 2026-05-17
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2030 since deposited on 2021-10-27
4last month
Acq. date: 2026-05-17
Citations