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Defect creation stimulated by thermally activated hole trapping as the driving force behind negative bias temperature instability in SiO2, SiON, and high-k gate stacks

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1954 since deposited on 2021-10-17
1last month
Acq. date: 2026-03-16

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1954 since deposited on 2021-10-17
1last month
Acq. date: 2026-03-16

Citations