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The influence of post-etch InGaAs Fin profile on electrical performance
Publication:
The influence of post-etch InGaAs Fin profile on electrical performance
Date
2013
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ivanov, Tsvetan
;
Pourghaderi, Mohammad Ali
;
Lin, Dennis
;
Yu, Jen-Kan
;
Tan, S.
;
Mikhaylich, K.
;
Kimura, Y.
;
Hellin, David
;
Geypen, Jef
;
Bender, Hugo
;
Vertommen, Johan
;
Kamarthy, G.
;
Collaert, Nadine
;
Marks, J.
;
Vahedi, V
;
Arghavani, R.
;
Thean, Aaron
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1913
since deposited on 2021-10-21
Acq. date: 2025-10-22
Citations
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Views
1913
since deposited on 2021-10-21
Acq. date: 2025-10-22
Citations