Publication:

Towards optimal ESD diodes in next generation bulk FinFET and GAA NW technology nodes

Date

2017

Proceedings Paper

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Files

36681.pdf 1.53 MB

Author(s)

Chen, Shih-Hung

;

Hellings, Geert

;

Linten, Dimitri

;

Chiarella, Thomas

;

;

;

;

Kubicek, Stefan

;

Ritzenthaler, Romain

;

;

;

Groeseneken, Guido

;

;

Horiguchi, Naoto

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Acq. date: 2026-09-19