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Dominant layer for stress-induced positive charges in Hf-based gate stacks
Publication:
Dominant layer for stress-induced positive charges in Hf-based gate stacks
Date
2008
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhang, Jian F.
;
Chang, M.H.
;
Ji, Z.
;
Lin, L.
;
Ferain, Isabelle
;
Groeseneken, Guido
;
Pantisano, Luigi
;
De Gendt, Stefan
;
Heyns, Marc
Journal
IEEE Electron Device Letters
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1929
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1929
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations