Publication:
Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
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1992 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
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Metrics
Views
1992 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
Citations