Publication:
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
Date
| dc.contributor.author | Nguyen, Duy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Van Daele, Benny | |
| dc.contributor.author | Ryan, Paul | |
| dc.contributor.author | Wormington, Paul | |
| dc.contributor.author | Hopkins, John | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.date.accessioned | 2021-10-16T18:08:55Z | |
| dc.date.available | 2021-10-16T18:08:55Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12614 | |
| dc.identifier.url | http://www.murota.riec.tohoku.ac.jp/SiGeC2007/ | |
| dc.source.conference | 3rd International Workshop on New Group IV Semiconductor Nanoelectronics | |
| dc.source.conferencedate | 8/11/2007 | |
| dc.source.conferencelocation | Sendai Japan | |
| dc.title | In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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