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Modification of the effective minority carrier lifetime of silicon substrates by heat treatment and/or hydrogenation

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dc.contributor.authorUlyashin, A.G.
dc.contributor.authorScherff, M.
dc.contributor.authorJob, R.
dc.contributor.authorFahrner, W.R.
dc.contributor.authorBilyalov, Renat
dc.contributor.authorPoortmans, Jef
dc.contributor.authorAbrosimov, N.
dc.contributor.authorRiemann, H.
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-15T07:04:59Z
dc.date.available2021-10-15T07:04:59Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8239
dc.source.conference10th Int. Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology - GADEST
dc.source.conferencedate21/09/2003
dc.source.conferencelocationBerlin Germany
dc.title

Modification of the effective minority carrier lifetime of silicon substrates by heat treatment and/or hydrogenation

dc.typeOral presentation
dspace.entity.typePublication
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