Publication:
Low temperature wafer bonding on silicon nitride
Date
| dc.contributor.author | Pedrine, Antonio | |
| dc.contributor.author | De Poorter, John | |
| dc.contributor.author | De Schepper, Luc | |
| dc.contributor.author | Baert, Kris | |
| dc.date.accessioned | 2021-09-29T13:15:40Z | |
| dc.date.available | 2021-09-29T13:15:40Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/816 | |
| dc.source.beginpage | 285 | |
| dc.source.conference | Simulation and Design of Microstructures; Sept. 1995; Southampton, UK. | |
| dc.source.conferencedate | 1/09/1995 | |
| dc.source.conferencelocation | Southampton UK | |
| dc.source.endpage | 292 | |
| dc.title | Low temperature wafer bonding on silicon nitride | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |