Publication:
Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA)
Date
| dc.contributor.author | Jacobs, Kristof J.P. | |
| dc.contributor.author | De Vos, Joeri | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.imecauthor | Jacobs, Kristof J.P. | |
| dc.contributor.imecauthor | De Vos, Joeri | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | Jacobs, Kristof J.P.::0000-0002-1081-3633 | |
| dc.contributor.orcidimec | De Vos, Joeri::0000-0002-9332-9336 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-25T20:13:07Z | |
| dc.date.available | 2021-10-25T20:13:07Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30945 | |
| dc.identifier.url | http://www-nanots.ist.osaka-u.ac.jp/en/?plugin=attach&refer=%E3%83%80%E3%82%A6%E3%83%B3%E3%83%AD%E3%83%BC%E3%83%89&openfile=NANOTS2018-programE.pdf | |
| dc.source.beginpage | 1 | |
| dc.source.conference | 38th Annual Nano Testing Symposium - NANOTS2018 | |
| dc.source.conferencedate | 19/11/2018 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.source.endpage | 6 | |
| dc.title | Open defect localization in 1x5 $lm 3-D TSV structures by Light-Induced Capacitance Alteration (LICA) | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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