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Correlation between optical and physical depth measurements: errors related to transparent layers

Date

2001
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dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-14T17:05:32Z
dc.date.available2021-10-14T17:05:32Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5369
dc.source.conference13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.
dc.source.conferencelocation
dc.title

Correlation between optical and physical depth measurements: errors related to transparent layers

dc.typeOral presentation
dspace.entity.typePublication
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