Publication:
Nanoscale etching and surface preparation of III-V materials for advanced CMOS processing
Date
| dc.contributor.author | van Dorp, Dennis | |
| dc.contributor.imecauthor | van Dorp, Dennis | |
| dc.contributor.orcidimec | van Dorp, Dennis::0000-0002-1085-4232 | |
| dc.date.accessioned | 2021-10-22T07:07:43Z | |
| dc.date.available | 2021-10-22T07:07:43Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24684 | |
| dc.source.conference | 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS | |
| dc.source.conferencedate | 21/09/2014 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Nanoscale etching and surface preparation of III-V materials for advanced CMOS processing | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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