Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns

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Author(s)

Pathangi Sriraman, Hari

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Van Den Heuvel, Dieter

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Rincon Delgadillo, Paulina

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Van Look, Lieve

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Nafus, Kathleen

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Somervell, Mark

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Harukawa, Ryoto

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Nagaswami, Venkat

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Metrics

2010 since deposited on 2021-10-22

Acq. date: 2025-10-23