ALD HfO2 surface preparation study

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Author(s)

Delabie, Annelies

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Bajolet, Philippe

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Cartier, Eduard

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Conard, Thierry

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De Gendt, Stefan

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Richard, Olivier

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Vandervorst, Wilfried

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Metrics

2046 since deposited on 2021-10-15

Acq. date: 2025-10-23