Publication:

ALD HfO2 surface preparation study

Date

2003

Proceedings Paper

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Files

7229.pdf 402.17 KB

Author(s)

Delabie, Annelies

;

;

;

Bajolet, Philippe

;

;

Cartier, Eduard

;

Conard, Thierry

;

De Gendt, Stefan

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

;

Statistics

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Acq. date: 2026-04-05