Publication:

ALD HfO2 surface preparation study

Date

2003

Proceedings Paper

Simple item page Full metadata Statistics

Files

7229.pdf 402.17 KB

Author(s)

Delabie, Annelies

;

;

;

Bajolet, Philippe

;

;

Cartier, Eduard

;

Conard, Thierry

;

De Gendt, Stefan

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

;

Statistics

2061 since deposited on 2021-10-15

Acq. date: 2026-07-07