Publication:
In-line wafer-level monitoring of the strain gradient in MEMS structural layers using an optical interferometer
Date
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-20T18:08:44Z | |
| dc.date.available | 2021-10-20T18:08:44Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21755 | |
| dc.source.beginpage | 433 | |
| dc.source.book | Optical Measurement Techniques for Systems & Structures | |
| dc.source.endpage | 444 | |
| dc.title | In-line wafer-level monitoring of the strain gradient in MEMS structural layers using an optical interferometer | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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