Publication:

Nanoscale analysis of planar and 3D-Si-structures

Date

2009
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorMody, Jay
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKoelling, Sebastian
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.date.accessioned2021-10-18T04:25:33Z
dc.date.available2021-10-18T04:25:33Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16425
dc.source.conference16th Microscopy of Semiconducting Materials Conference - MSM XVI
dc.source.conferencedate17/03/2009
dc.source.conferencelocationOxford UK
dc.title

Nanoscale analysis of planar and 3D-Si-structures

dc.typeOral presentation
dspace.entity.typePublication
Files

Original bundle

Name:
19066.doc
Size:
999 KB
Format:
Microsoft Word
Download
Publication available in collections:
Presentations