Publication:

Material aspects and challenges for SOI FinFET integration

Date

2008

Meeting abstract

Simple item page Full metadata Statistics

Files

16945.pdf 305.82 KB

Author(s)

;

Vellianitis, Georgios

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;

;

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Hikavyy, Andriy

;

Collaert, Nadine

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Statistics

1927 since deposited on 2021-10-17

Acq. date: 2026-07-19