Publication:

The impact of ultra thin ALD TiN metal gate on low frequency noise of CMOS transistors

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorSinganamalla, Raghunath
dc.contributor.authorSubramanian, Vaidy
dc.contributor.authorSimoen, Eddy
dc.contributor.authorSansen, Willy
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorDecoutere, Stefaan
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2021-10-16T17:55:35Z
dc.date.available2021-10-16T17:55:35Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12571
dc.source.beginpage33
dc.source.conferenceNoise and Fluctuations, 19th International Conference
dc.source.conferencedate9/09/2007
dc.source.conferencelocationTokyo Japan
dc.source.endpage38
dc.title

The impact of ultra thin ALD TiN metal gate on low frequency noise of CMOS transistors

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions