Publication:

Silicon nanophotonic wire structures fabricated by 193nm optical lithography

Date

2007-10
Proceedings Paper
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dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorJaenen, Patrick
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-16T19:35:01Z
dc.date.available2021-10-16T19:35:01Z
dc.date.embargo9999-12-31
dc.date.issued2007-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12875
dc.source.beginpage48
dc.source.conference20th Annual Meeting of the IEEE Lasers and Electro-Optics Society - LEOS
dc.source.conferencedate21/10/2007
dc.source.conferencelocationLake Buena Vista, FL USA
dc.source.endpage49
dc.title

Silicon nanophotonic wire structures fabricated by 193nm optical lithography

dc.typeProceedings paper
dspace.entity.typePublication
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