Publication:

Origin of visible luminescence in hydrogenated amorphous silicon nitride

Date

 
dc.contributor.authorHao, H. L.
dc.contributor.authorWu, L. K.
dc.contributor.authorShen, W. Z.
dc.contributor.authorDekkers, Harold
dc.contributor.imecauthorDekkers, Harold
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.date.accessioned2021-10-16T16:27:49Z
dc.date.available2021-10-16T16:27:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12245
dc.source.beginpage201922
dc.source.issue20
dc.source.journalApplied Physics Letters
dc.source.volume91
dc.title

Origin of visible luminescence in hydrogenated amorphous silicon nitride

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections: