Publication:

Interconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes

Date

2020
Proceedings Paper
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dc.contributor.authorBaert, Rogier
dc.contributor.authorCiofi, Ivan
dc.contributor.authorPatli, Sudhir
dc.contributor.authorZografos, Odysseas
dc.contributor.authorSarkar, Satadru
dc.contributor.authorChehab, Bilal
dc.contributor.authorJang, Doyoung
dc.contributor.authorSpessot, Alessio
dc.contributor.authorRyckaert, Julien
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorPatli, Sudhir
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorSarkar, Satadru
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.date.accessioned2021-10-28T20:12:24Z
dc.date.available2021-10-28T20:12:24Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34670
dc.source.beginpage28
dc.source.conference23rd IEEE International Interconnect Technology Conference - IITC 2020
dc.source.conferencedate1/06/2020
dc.source.conferencelocationSan Jose, CA (online) USA
dc.source.endpage30
dc.title

Interconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes

dc.typeProceedings paper
dspace.entity.typePublication
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