Publication:

Mask Contribution to OPC Model Accuracy

Date

2020

Proceedings Paper

https://doi.org/10.1117/12.2573160

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Author(s)

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Hennerkes, Christoph

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Hamaji, Masakazu

Journal

Proceedings of SPIE

Statistics

1842 since deposited on 2021-11-02

Acq. date: 2026-02-27