Publication:
Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1951 since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
1951 since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations