Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers

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Author(s)

Machkaoutsan, Vladimir

;

Verheyen, Peter

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;

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Koelling, Sebastian

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Franquet, Alexis

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Vanormelingen, Koen

;

;

;

;

Horiguchi, Naoto

;

Kerner, Christoph

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Hoffmann, Thomas

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;

Vandervorst, Wilfried

;

Absil, Philippe

;

Journal

Microelectronic Engineering

Metrics

1895 since deposited on 2021-10-18

Acq. date: 2025-10-23