Publication:

Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers

Date

2010

Journal article

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Files

19082.pdf 771.84 KB

Author(s)

Machkaoutsan, Vladimir

;

Verheyen, Peter

;

;

;

Koelling, Sebastian

;

Franquet, Alexis

;

Vanormelingen, Koen

;

;

;

;

Horiguchi, Naoto

;

Kerner, Christoph

;

Hoffmann, Thomas

;

;

Vandervorst, Wilfried

;

Absil, Philippe

;

Journal

Microelectronic Engineering

Statistics

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