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The nature of precursors for the thermal donor formation in silicon

Date

1999
Proceedings Paper
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dc.contributor.authorNeimash, V. B.
dc.contributor.authorPuzenko, O. O.
dc.contributor.authorKabaldin, O. M.
dc.contributor.authorKraitchinskii, A. M.
dc.contributor.authorKras'ko, M. M.
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-14T11:31:28Z
dc.date.available2021-10-14T11:31:28Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3695
dc.source.beginpage351
dc.source.conferenceProceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST
dc.source.conferencedate25/09/1999
dc.source.conferencelocationH��r Sweden
dc.source.endpage356
dc.title

The nature of precursors for the thermal donor formation in silicon

dc.typeProceedings paper
dspace.entity.typePublication
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