Publication:

Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy

Date

1999
Proceedings Paper
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-06T11:16:37Z
dc.date.available2021-10-06T11:16:37Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3488
dc.source.beginpage994
dc.source.conferenceDesign, Test, and Microfabrication of MEMS and MOEMS
dc.source.conferencedate30/03/1999
dc.source.conferencelocationParis France
dc.source.endpage1005
dc.title

Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy

dc.typeProceedings paper
dspace.entity.typePublication
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