Publication:
Integrated measurement set-up for ESD in MEMS
Date
| dc.contributor.author | Sangameswaran, Sandeep | |
| dc.date.accessioned | 2021-10-18T02:34:22Z | |
| dc.date.available | 2021-10-18T02:34:22Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16152 | |
| dc.source.conference | IMEC Annual PhD Days | |
| dc.source.conferencedate | 16/11/2009 | |
| dc.source.conferencelocation | Heverlee Belgium | |
| dc.title | Integrated measurement set-up for ESD in MEMS | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |