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A surface micromachined tunable film bulk acoustic resonator
Publication:
A surface micromachined tunable film bulk acoustic resonator
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Date
2004
Proceedings Paper
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10396.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pan, Wanling
;
Soussan, Philippe
;
Nauwelaers, Bart
;
Tilmans, Harrie
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Abstract
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1872
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations
Metrics
Views
1872
since deposited on 2021-10-15
Acq. date: 2025-12-11
Citations