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The fate of the (reactive) primary ion: sputtering and desorption
Publication:
The fate of the (reactive) primary ion: sputtering and desorption
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Janssens, Tom
;
Berghmans, Bart
;
Huyghebaert, Cedric
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1849
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Acq. date: 2025-12-16
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Metrics
Views
1849
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-16
Citations