Publication:

Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layers

Date

2024
Journal article
https://doi.org/10.1038/s41598-024-78919-w
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dc.contributor.authorBirant, Gizem
dc.contributor.authorRossi, Christian
dc.contributor.authorCzech, Jan
dc.contributor.authorMarchal, Wouter
dc.contributor.authorBrammertz, Guy
dc.contributor.authorAernouts, Tom
dc.contributor.authorColombara, Diego
dc.contributor.authorde Wild, Jessica
dc.contributor.authorVermang, Bart
dc.contributor.imecauthorBirant, Gizem
dc.contributor.imecauthorCzech, Jan
dc.contributor.imecauthorMarchal, Wouter
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorAernouts, Tom
dc.contributor.imecauthorde Wild, Jessica
dc.contributor.imecauthorVermang, Bart
dc.contributor.orcidimecBirant, Gizem::0000-0003-0496-8150
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecAernouts, Tom::0000-0002-3004-6080
dc.contributor.orcidimecde Wild, Jessica::0000-0003-2291-4674
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.date.accessioned2025-03-25T10:09:17Z
dc.date.available2024-11-24T16:40:19Z
dc.date.available2025-03-25T10:09:17Z
dc.date.embargo2024-11-09
dc.date.issued2024
dc.description.wosFundingTextThis work received funding from the European Union's H2020 research and innovation program under grant agreement No. 715027 (Uniting PV). Authors thank Research Foundation - Flanders (FWO) for the funding through the project number 1219423 N (ARLEA) and G0A1623N (ENGAGED).
dc.identifier.doi10.1038/s41598-024-78919-w
dc.identifier.issn2045-2322
dc.identifier.pmidMEDLINE:39521833
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44838
dc.publisherNATURE PORTFOLIO
dc.source.beginpageArt. 27347
dc.source.endpageN/A
dc.source.issue1
dc.source.journalSCIENTIFIC REPORTS
dc.source.numberofpages12
dc.source.volume14
dc.subject.keywordsDEPOSITION
dc.title

Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layers

dc.typeJournal article
dspace.entity.typePublication
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