Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

dc.contributor.author	Aarts, Arno
dc.contributor.author	Srivannavit, O
dc.contributor.author	Wise, K.D.
dc.contributor.author	Yoon, E.
dc.contributor.author	Puers, Bob
dc.contributor.author	Van Hoof, Chris
dc.contributor.author	Pereira Neves, Hercules
dc.contributor.imecauthor	Aarts, Arno
dc.contributor.imecauthor	Puers, Bob
dc.contributor.imecauthor	Van Hoof, Chris
dc.date.accessioned	2021-10-19T12:28:14Z
dc.date.available	2021-10-19T12:28:14Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.issn	0960-1317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/18437
dc.identifier.url	http://iopscience.iop.org/0960-1317/21/7/074012/pdf/0960-1317_21_7_074012.pdf
dc.source.beginpage	74012
dc.source.issue	7
dc.source.journal	Journal of Micromechanics and Microengineering
dc.source.volume	21
dc.title	Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process
dc.type	Journal article
dspace.entity.type	Publication
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