Publication:

Defect localization in 3-D TSV structures by differential light-induced capacitance alteration

Date

2018

Meeting abstract

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Author(s)

Jacobs, Kristof J.P.

;

Stucchi, Michele

;

Afanasiev, Valeri

;

Gonzalez, Mario

;

;

De Wolf, Ingrid

;

Statistics

1988 since deposited on 2021-10-25

2last month

Acq. date: 2026-02-27