Publication:

Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing

Date

2009
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorArjmandi, Nima
dc.contributor.authorLagae, Liesbet
dc.contributor.authorBorghs, Gustaaf
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorBorghs, Gustaaf
dc.date.accessioned2021-10-17T21:18:02Z
dc.date.available2021-10-17T21:18:02Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14905
dc.identifier.urlhttp://scitation.aip.org/jvstb/
dc.source.beginpage1915
dc.source.endpage1918
dc.source.issue4
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume27
dc.title

Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
18537.pdf
Size:
685.23 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles