Publication:
Integration of 20nm half pitch single damascene copper trenches by spacer-defined double patterning (SDDP) on metal hard mask (MHM)
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2191 since deposited on 2021-10-18
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Acq. date: 2026-08-05
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Statistics
Views
2191 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-08-05
Citations