Publication:
Integration of 20nm half pitch single damascene copper trenches by spacer-defined double patterning (SDDP) on metal hard mask (MHM)
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2187 since deposited on 2021-10-18
3last month
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Acq. date: 2026-02-25
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Statistics
Views
2187 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-02-25
Citations