Publication:

Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010751
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dc.contributor.authorSingh, Dhirendra
dc.contributor.authorDorney, Kevin
dc.contributor.authorHolzmeier, Fabian
dc.contributor.authorWitting Larsen, Esben
dc.contributor.authorGalleni, Laura
dc.contributor.authorMokhtarzadeh, Charles
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorConard, Thierry
dc.contributor.authorPetersen, John
dc.contributor.authorvan der Heide, Paul
dc.contributor.imecauthorHolzmeier, Fabian
dc.contributor.imecauthorGalleni, Laura
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSingh, Dhirendra
dc.contributor.imecauthorDorney, Kevin
dc.contributor.imecauthorWitting Larsen, Esben
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorPetersen, John
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecHolzmeier, Fabian::0000-0001-8749-5330
dc.contributor.orcidimecGalleni, Laura::0000-0002-6675-7829
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecSingh, Dhirendra::0000-0002-8855-0597
dc.contributor.orcidimecDorney, Kevin::0000-0003-2097-6994
dc.contributor.orcidimecWitting Larsen, Esben::0000-0002-6294-0896
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecPetersen, John::0000-0003-4815-3770
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2024-08-19T13:07:49Z
dc.date.available2024-06-15T17:25:27Z
dc.date.available2024-08-19T13:07:49Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.description.wosFundingTextD. P. S. and K. M. D. acknowledge funding from the European Union's Horizon 2020 research and innovation program under the Marie Sklodowska-Curie grant agreement No.'s 101032241 (D.P.S.) and 101031245 (K.M.D.). We also gratefully acknowledge FujiFilm for providing the model ESCAP material used in this work. We would also like to thank Roberto Fallica, Ivan Pollentier, and Danilo De Simone for their support and assistance. We would also like to acknowledge James M. Blackwell of Intel for in-depth technical conversations.
dc.identifier.doi10.1117/12.3010751
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44041
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1295504
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages7
dc.source.volume12955
dc.title

Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

dc.typeProceedings paper
dspace.entity.typePublication
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