Publication:

EUV mask defectivity: status and mitigation towards HVM

Date

2010

Proceedings Paper

Simple item page Full metadata Statistics

Files

20875.pdf 1.83 MB

Author(s)

Jonckheere, Rik

;

Van Den Heuvel, Dieter

;

Lamantia, Matthew

;

Baudemprez, Bart

;

Hendrickx, Eric

;

Metrics

1922 since deposited on 2021-10-18

3last month

Acq. date: 2025-12-12