Publication:
Microstructural and electrical characterization of thin dielectrica with high k values
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | cd64798b-209f-4400-845f-d93dc2af9e6d | |
| cris.virtualsource.orcid | cd64798b-209f-4400-845f-d93dc2af9e6d | |
| dc.contributor.author | Petry, Jasmine | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T04:03:39Z | |
| dc.date.available | 2021-10-16T04:03:39Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2005-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11014 | |
| dc.title | Microstructural and electrical characterization of thin dielectrica with high k values | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |