Publication:

Stress techniques in advanced transistor architectures: bulk FinFETs and implant-free quantum well transistors

Date

2012
Proceedings Paper
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Author(s)

Eneman, Geert  
;
Witters, Liesbeth  
;
Collaert, Nadine  
;
Mitard, Jerome  
;
Hellings, Geert  
;
Yamaguchi, Shinpei
;
De Keersgieter, An  
;
Hikavyy, Andriy  
;
Vincent, Benjamin  
;
Favia, Paola  
;
Bender, Hugo  
;
Veloso, Anabela  
;
Chiarella, Thomas  
;
Togo, Mitsuhiro
;
Loo, Roger  
;
De Meyer, Kristin  
;
Mercha, Abdelkarim  
;
Horiguchi, Naoto  
;
Thean, Aaron  

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1928 since deposited on 2021-10-20
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