RMG Technology Integration in FinFET Devices

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Author(s)

Boccardi, Guillaume

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Ritzenthaler, Romain

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Togo, Mitsuhiro

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Chiarella, Thomas

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Sasaki, Yuichiro

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Veloso, Anabela

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;

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Locorotondo, Sabrina

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Devriendt, Katia

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Horiguchi, Naoto

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Metrics

2050 since deposited on 2021-10-20

Acq. date: 2025-10-23