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RMG Technology Integration in FinFET Devices
Publication:
RMG Technology Integration in FinFET Devices
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Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Boccardi, Guillaume
;
Ritzenthaler, Romain
;
Togo, Mitsuhiro
;
Chiarella, Thomas
;
Kim, Min-Soo
;
Sasaki, Yuichiro
;
Veloso, Anabela
;
Chew, Soon Aik
;
Vecchio, Emma
;
Locorotondo, Sabrina
;
Devriendt, Katia
;
Ong, Patrick
;
Brus, Stephan
;
Horiguchi, Naoto
;
Thean, Aaron
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Acq. date: 2025-12-10
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Views
2054
since deposited on 2021-10-20
2
last month
1
last week
Acq. date: 2025-12-10
Citations