Publication:
A high-throughput silicon microphysiometer
Date
| dc.contributor.author | Verhaegen, Katarina | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Simaels, J. | |
| dc.contributor.author | Van Driessche, W. | |
| dc.date.accessioned | 2021-10-14T11:54:48Z | |
| dc.date.available | 2021-10-14T11:54:48Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4001 | |
| dc.source.conference | Proceedings 10th International Conference on Solid State Sensors and Actuators - Transducers | |
| dc.source.conferencedate | 6/06/1999 | |
| dc.source.conferencelocation | Sendai Japan | |
| dc.title | A high-throughput silicon microphysiometer | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |