Publication:

Oil as an Enabler for Efficient Materials Removal in Three-Dimensional Scanning Probe Microscopy Applications

Date

2021-12
Journal article
https://doi.org/10.3389/fmech.2021.797962
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dc.contributor.authorNoel, Celine
dc.contributor.authorWouters, Lennaert
dc.contributor.authorParedis, Kristof
dc.contributor.authorCelano, Umberto
dc.contributor.authorHantschel, Thomas
dc.contributor.imecauthorNoel, Celine
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecNoel, Celine::0000-0002-3000-8914
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2022-09-27T09:33:58Z
dc.date.available2022-01-11T02:07:16Z
dc.date.available2022-09-15T11:47:54Z
dc.date.available2022-09-27T09:33:58Z
dc.date.issued2021-12
dc.identifier.doi10.3389/fmech.2021.797962
dc.identifier.issn2297-3079
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38731
dc.publisherFRONTIERS MEDIA SA
dc.source.beginpage1
dc.source.endpage8
dc.source.issue797962
dc.source.journalFRONTIERS IN MECHANICAL ENGINEERING-SWITZERLAND
dc.source.numberofpages8
dc.source.volume7
dc.subject.keywordsatomic force microscopy
dc.subject.keywordsSPM
dc.subject.keywordsoil
dc.subject.keywordsnanotomography
dc.subject.keywordsdiamond tip
dc.subject.keywordsdebris removal
dc.subject.keywordsscalpel SPM
dc.title

Oil as an Enabler for Efficient Materials Removal in Three-Dimensional Scanning Probe Microscopy Applications

dc.typeJournal article
dspace.entity.typePublication
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