Publication:
SOI photonic crystal fabrication using deep UV lithography
Date
| dc.contributor.author | Bogaerts, Wim | |
| dc.contributor.imecauthor | Bogaerts, Wim | |
| dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
| dc.date.accessioned | 2021-10-14T16:38:10Z | |
| dc.date.available | 2021-10-14T16:38:10Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5080 | |
| dc.source.conference | NKT Summer School on Advanced Photonics; 19-26 August 2001; Copenhagen, Denmark. | |
| dc.source.conferencelocation | ||
| dc.title | SOI photonic crystal fabrication using deep UV lithography | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |