Publication:
Elemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMS
Date
| dc.contributor.author | Kollmer, F. | |
| dc.contributor.author | Kamischke, R. | |
| dc.contributor.author | Ostendorf, R. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Benninghoven, A. | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-14T13:10:59Z | |
| dc.date.available | 2021-10-14T13:10:59Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4490 | |
| dc.source.conference | 47th International Symposium of the American Vacuum Society. Session on Materials Characterization, Evolving Technologies in Sur | |
| dc.source.conferencelocation | ||
| dc.title | Elemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMS | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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